Large area EBSD scans with distortion corrections

Distortion correction calibration
Distortion correction calibration
Distortion correction calibration
Distortion correction stitching
non corrected
distortion corrected

Summary:

  • A forehand calibration procedure has to be performed, visualized above. Corrected beam-scan voltages will get the «perfect» square and proper calibration of Y and X scales using NORDIF 3 software. Corrected beam-scan voltages solve stitching errors. This calibration will be valid for a specific set of SEM settings like: magnification, tilt angle, working distance and acceleration voltage. Ref: ICOTOM-18 IOP Conf. Series: Materials Science and Engineering 375 (2018)
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